发明名称 |
Flow sensor unit including an insulating member interposed between the sensor chip and the attachment plate |
摘要 |
A flow sensor may be formed of a sensor chip in which a flow rate detecting section is formed on an electric insulating film applied to cover at least a part of a concave portion formed on an upper surface of a substrate and may also include a flow path forming member which is provided on the sensor chip and has a flow path of a fluid flowing through the flow rate detecting section formed therein.
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申请公布号 |
US7765865(B2) |
申请公布日期 |
2010.08.03 |
申请号 |
US20080191924 |
申请日期 |
2008.08.14 |
申请人 |
YAMATAKE CORPORATION |
发明人 |
IKE SHINICHI;KAMIUNTEN SHOJI;KUMASA JUNJI |
分类号 |
G01F1/68 |
主分类号 |
G01F1/68 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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