| 摘要 |
<p>PURPOSE: A coating and developing device is provided to suppress the deterioration of a processed quantity by suppressing the decrease of the operation rate of a module in a process unit and an exposure device. CONSTITUTION: A transmission loader(21) loads a carrier which receives a plurality of substrates and a transmission unit accesses the carrier. A plurality of escape loader loads the carrier. The sequence of returning the substrates on each module to the original carrier is determined when a coating and developing device is not functional. A carrier transferring unit(3) transfers and mounts the carriers between the transmission loader and the escape loader according to the determined sequence. The substrate is transferred to the original carrier on the transmission loader according to the sequence.</p> |
