| 摘要 |
<p>PURPOSE: A micro heater and a manufacturing method thereof are provided to mechanically or chemically protect the micro heater by arranging a protection layer on a metal pattern which is a heat element of the micro heater. CONSTITUTION: A micro heater comprises a substrate(10), a metal pattern(20), and a protection layer(40). The metal pattern is separated from the substrate. The protection layer is positioned on the metal pattern. The protection layer is made of solid solutions with the metal pattern material. The solid solution includes silicon, titanium, or tin. The protection layer includes amorphous silicon, silicon oxide, silicon oxide nitride, silicon carbide, titanium nitride or indium-tin oxide.</p> |
