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发明名称
Method of manufacturing of semiconductor
摘要
申请公布号
KR100973266(B1)
申请公布日期
2010.08.02
申请号
KR20080000333
申请日期
2008.01.02
申请人
发明人
分类号
H01L27/108;H01L21/768
主分类号
H01L27/108
代理机构
代理人
主权项
地址
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