发明名称 ELECTROSTATIC CHUCK AND MANUFACTURING DEVICE OF ORGANIC LIGHT EMITTING DIODE HAVING THE SAME
摘要 PURPOSE: An electrostatic chuck and a device for manufacturing an organic electroluminescent device are provided to reduce a process time by finely aligning a substrate in a deposition process. CONSTITUTION: An insulation plate(20) is made of resin or ceramic. At least one opening is formed on the center of the insulation plate. A pair of electrodes are mounted on the insulation plate. A first controller(50) applies a voltage to the pair of electrodes. A neutralizer(40) is arranged to be adjacent to the insulation plate and discharges ions through the opening of the insulation plate to neutralize electrostatic charges.
申请公布号 KR20100086790(A) 申请公布日期 2010.08.02
申请号 KR20090006200 申请日期 2009.01.23
申请人 SAMSUNG MOBILE DISPLAY CO., LTD. 发明人 PARK, SANG YOUNG;MUN, JU EEL;CHA, YOU MIN;JUNG, WON WOONG
分类号 H05B33/10;H01L51/56 主分类号 H05B33/10
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