| 摘要 |
PURPOSE: An apparatus for automatically attaching a protective film is provided to minimize the contamination and a scratch due to a standby time and movement. CONSTITUTION: A clean booth(10) controls the generation of particles. A first protective film attaching unit(100) installed on one side of the clean booth attaches a protective film to one side of the substrate. A second protective film attaching unit(200) is installed on the other side of the clean booth in parallel to the first protective film attaching unit and attaches a protective film to the other side of the substrate. |
