| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a semiconductor testing apparatus which can perform a test with high precision, without causing decreases in testing accuracy, even when performing a test of a DUT having different clock delays for each application of a test signal. Ž<P>SOLUTION: The semiconductor test apparatus 1 includes flip flops 12a to 12c for obtaining data D1 to D3, by sampling a signal S0 output from a DUT 30 with the timing of strobe signals ST1 to ST3 output from variable delay elements 17a to 17c; a comparison unit 13 for comparing the data D1, D2 to an expected value pattern E1; and an adjustment unit (an arithmetic control unit 14, a DAC 15, and a PLL circuit 16) for adjusting the timing of the strobe signals ST1 to ST3 generated by the variable delay elements 17a to 17c, on the basis of the comparison result by the comparison unit 13. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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