发明名称 |
Scanning Probe Microscope with Independent Force Control and Displacement Measurements |
摘要 |
A nanoindenter that includes an interferometer, a rod, a force actuator and a controller is disclosed. The interferometer generates a light beam that is reflected from a moveable reflector, the interferometer determining a distance between a reference location and the moveable reflector. The rod is characterized by a rod axis and includes a tip on a first end thereof, the rod includes the moveable reflector at a location proximate to the tip. The tip is disposed in a manner that allows the tip to be forced against the surface of a sample. The force actuator applies a force to the rod in a direction parallel to the rod axis in response to a force control signal coupled to the actuator. The controller receives the determined distance from the interferometer and generates the force control signal. The invention can also be used as a scanning probe microscope.
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申请公布号 |
US2010192267(A1) |
申请公布日期 |
2010.07.29 |
申请号 |
US20090362359 |
申请日期 |
2009.01.29 |
申请人 |
OLIVER WARREN C;SWINDERMAN JOHN;HAY JENNIFER;PARKS KERMIT |
发明人 |
OLIVER WARREN C.;SWINDERNAN JOHN;HAY JENNIFER;PARKS KARMIT |
分类号 |
G01N0013/000016;G12B0021/000008 |
主分类号 |
G01N0013/000016 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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