发明名称 |
METHOD FOR GROWING SINGLE CRYSTAL IMPROVED IN TAIL-PROCESS AND GROWER FOR THE SAME |
摘要 |
PURPOSE: A method for growing a mono-crystalline with an improved tail process and an apparatus for the same are provided to prevent a pop-out phenomenon due to a difference between a mono-crystalline growth speed and a growth rate by preventing cooling power from being reduced in a tail process. CONSTITUTION: An external crucible(101) surrounds and supports a quartz crucible(100). A heater(102) heats the quartz crucible. A heat shield(103) is installed between a mono-crystalline ingot(C) and the quartz crucible to surround the mono-crystalline ingot. A lifting unit(105) elevates a seed cable(1). A lift controlling system controls the lift state of the crucible in order to maintain a constant melt gap(G) in a tail process.
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申请公布号 |
KR20100085470(A) |
申请公布日期 |
2010.07.29 |
申请号 |
KR20090004764 |
申请日期 |
2009.01.20 |
申请人 |
SILTRON INC. |
发明人 |
MOON, JI HUN;KIM, BONG WOO;CHOI, IL SOO;LEE, SANG HOON;JEONG, SEUNG;KIM, DO YEON;KIM, WOO TAE |
分类号 |
C30B15/20;C30B15/30;G01G7/02 |
主分类号 |
C30B15/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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