发明名称 METHOD FOR GROWING SINGLE CRYSTAL IMPROVED IN TAIL-PROCESS AND GROWER FOR THE SAME
摘要 PURPOSE: A method for growing a mono-crystalline with an improved tail process and an apparatus for the same are provided to prevent a pop-out phenomenon due to a difference between a mono-crystalline growth speed and a growth rate by preventing cooling power from being reduced in a tail process. CONSTITUTION: An external crucible(101) surrounds and supports a quartz crucible(100). A heater(102) heats the quartz crucible. A heat shield(103) is installed between a mono-crystalline ingot(C) and the quartz crucible to surround the mono-crystalline ingot. A lifting unit(105) elevates a seed cable(1). A lift controlling system controls the lift state of the crucible in order to maintain a constant melt gap(G) in a tail process.
申请公布号 KR20100085470(A) 申请公布日期 2010.07.29
申请号 KR20090004764 申请日期 2009.01.20
申请人 SILTRON INC. 发明人 MOON, JI HUN;KIM, BONG WOO;CHOI, IL SOO;LEE, SANG HOON;JEONG, SEUNG;KIM, DO YEON;KIM, WOO TAE
分类号 C30B15/20;C30B15/30;G01G7/02 主分类号 C30B15/20
代理机构 代理人
主权项
地址