EVAPORATION APPARATUS FOR ORGANIC LIGHT EMITTING DISPLAY

摘要

PURPOSE: A deposition device for an organic light emitting display device is provided to prevent the shadowing due to the weakening of the force of pulling a mask and the deformation of the mechanical objects due to magnetic strength difference between arranged magnets. CONSTITUTION: A deposition source is positioned on the lower side of a vacuum chamber. A mask(160) masks the source generated from a deposition source. A target substrate(150) deposits the source passing through the mask. A first plate(130) is positioned on the upper side of the vacuum chamber. The magnets are separately arranged on one side of the first plate. A second plate(140) is positioned on the lower side of the first plate and arranges grooves into which the magnets are inserted.