| 摘要 |
PROBLEM TO BE SOLVED: To provide an alignment device for vacuum vapor deposition, which is manufactured at a low cost and can keep a highly precise positioning performance. SOLUTION: This alignment device has: a substrate holder 11 that is held in the upper part of a mask which is held in a vacuum vessel 3, through a hanging member 12 which is inserted in a through-hole 1b formed in an attachment flange 1a of the vacuum vessel; a tabular body 13 for connection, which is arranged outside the vacuum vessel and also is connected to the hanging member; a positioning means 14 which can adjust the position of a substrate in a vapor-deposition chamber 2 held by the substrate holder with respect to the mask, by moving the tabular body for connection; a telescoping type cylindrical shielding member 15 which fits the outer periphery of the hanging member and also is arranged between the outer periphery of the through-hole of the attachment flange and the tabular body for connection to isolate the vacuum side from the atmosphere side; and an air-pressure cylinder 61 which is arranged between the tabular body for connection and the attachment flange, and generates a biasing force that is equivalent to a pressing force working onto the tabular body for connection, which is generated by a vacuum state of the inner side of the cylindrical shielding member, in a direction reverse to the direction of the pressing force. COPYRIGHT: (C)2010,JPO&INPIT
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