发明名称 MASK CASE, TRANSFER APPARATUS, EXPOSURE APPARATUS, MASK TRANSFER METHOD AND DEVICE MANUFACTURING METHOD
摘要 A mask is stored in a mask case (C). The mask case (C) is provided with a reinforcing member having strength corresponding to the load of the mask, on a contact section with a transfer vehicle (V) and a transfer apparatus (H1), which are external apparatuses whereupon the mask case is to be placed. The transfer vehicle (V) and the transfer apparatus (H1), which transfer the mask, support the reinforcing member of the mask case (C) wherein the mask is stored, and have a plurality of transfer balls (43, 52), respectively, as case supporting sections, for suppressing friction generated between the reinforcing member and themselves.
申请公布号 KR20100085901(A) 申请公布日期 2010.07.29
申请号 KR20107004397 申请日期 2008.11.12
申请人 NIKON CORPORATION 发明人 MUKAI MIKIHITO;SUITA BUNGO
分类号 H01L21/67;B65G49/07;G03F7/20 主分类号 H01L21/67
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