| 摘要 |
<p>PURPOSE: A contact exposing device and a contact exposing method using the same are provided to prevent the deterioration of a position matching accuracy by not contacting the leading end for forming a seal space of a seal member with the lower side of the mask stage. CONSTITUTION: A mask stage(3) maintains a mask(2) with a pattern. A work stage(5) maintains a work(4) for an exposure process. A seal member(6) is formed on the peripheral part of a work stage or mask stage. The seal member includes a seal member moving device(9) which vertically moves the leading end.</p> |
