| 摘要 |
PROBLEM TO BE SOLVED: To provide a surface property measuring device forming a three-dimensional contactor model with high accuracy, and to provide its contactor model generation method, and a program. SOLUTION: The surface property measuring device includes: the contactor 24 whose tip can be brought into contact with a measuring object; and a control part 41 for moving the contactor 24 along the X-axis, the Y-axis and the Z-axis. The control part 41 drives the contactor 24 to trace the surface of the measuring object, and acquires a tip position of the contactor 24 as a pseudo measuring point Pi. The control part 41 calculates the three-dimensional contactor model M2 by performing copy measurement of a reference work 4 by the contactor 24. The control part 41 drives rotationally the contactor 24 around the Z-axis. The control part 41 moves the contactor 24 along the X-axis direction and the Z-axis direction at each of a plurality of rotating positions of the contactor 24 driven rotationally, performs copy measurement of the reference work 4 to acquire the pseudo measuring point Pi, and calculates the three-dimensional contactor model M2 based on the acquired pseudo measuring point Pi. COPYRIGHT: (C)2010,JPO&INPIT
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