| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a method of more simply manufacturing a structure by preventing the generation of residues of a pattern obtained by pressing a mold. <P>SOLUTION: The method of manufacturing the structure includes: a step of preparing a substrate 12 provided with a resin film composed of positive type photosensitive resin; a step of applying negative type photosensitive resin compatible with the positive type photosensitive resin 7 to the surface of the resin film; a step of forming a compatible layer for making the positive type photosensitive resin 7 and the negative photosensitive resin existing between projected portions of a mold pattern and the substrate compatible with each other; a step of irradiating the whole surface with active energy rays through the substrate or the mold to cure the negative type photosensitive resin and make the positive type photosensitive resin and the compatible layer soluble in a developing solution; a step of separating the mold, forming a pattern on the negative photosensitive resin and then sticking the negative type photosensitive resin to the other support substrate; a step of peeling off the substrate from the positive photosensitive resin and the compatible layer; and a step of removing the positive photosensitive resin and the compatible layer by the developing solution. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
