| 摘要 |
PROBLEM TO BE SOLVED: To automatically stop measurement before a sample is damaged by electron beam irradiation, in an analysis method for detecting X-rays generated from the sample by electron beam irradiation. SOLUTION: X-rays, secondary electrons or the like generated from the sample by electron beam irradiation are detected respectively by an X-ray detector 24 and an electron detector 23, and results are stored in a storage part 34 as time series data combined in time series together with elapsed time information and a coordinate position. While measuring, an X-ray signal is extracted from the storage part 34 at fixed time intervals from start of measurement, and an X-ray spectrum is reproduced. A fluctuation with elapse of time of X-ray intensity in the whole spectrum or in an optionally specified energy range is monitored, and when detecting an abnormality, measurement is stopped manually or automatically. COPYRIGHT: (C)2010,JPO&INPIT
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