METHOD OF GLASS SURFACE FINE PROCESSING

摘要

PROBLEM TO BE SOLVED: To provide a method of glass surface fine processing by which a glass surface can easily be subjected to fine processing of not only in μm order but also in nm order. SOLUTION: The method of glass surface fine processing for forming a convex portion on a surface of glass containing alkali-metal oxides includes: a step of coating a surface of a first region adjacent to a surface of a second region which is to be a convex portion, with a protective layer; a step of removing alkali ions from the surface of the second region; a step of removing the protective layer from the surface of the first region; and a step of polishing the surface of the second region from which the alkali ions have been removed and the surface of the first region from which the protective layer has been removed. COPYRIGHT: (C)2010,JPO&INPIT