| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a low consumption current electrostatic capacitance type sensing device which obtains positional data with high resolution. Ž<P>SOLUTION: This sensing device includes a stator 10 and a mover 20 facing the stator 10. The stator 10 includes an excitation electrode group periodically consisting of two or more electrically-independent excitation electrodes 11 each other, and a received electrode 14 electrically-independent from the excitation electrode group, while the mover 20 includes coupled electrodes 21 by the same number as the excitation electrode group periodically-arranged, and a transmitted electrode 22 connected with all the coupled electrodes 21. Further the device includes an excitation means 30 for exciting the excitation electrode and a signal processor 40 for processing detected signal of the received electrode 14. The excitation means 30 impresses two single-transmitted pulse voltages of the same amplitude/timing and different in polarization to two excitation electrodes mutually-different in phase by 180 degrees with arrangement period of the excitation electrode group defined as one period, and also impress two single-transmitted pulses of the same amplitude/timing and different in polarization to another two excitation electrodes different in phase by 90 degrees from the above two excitation electrodes. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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