| 摘要 |
PROBLEM TO BE SOLVED: To provide a diaphragm type actuator having required strength without separately requiring a sensor for detecting vibration. SOLUTION: The diaphragm type actuator 10 has an actuator piezoelectric element 20 bonded on one surface of a flat spring 22, and has a sensor piezoelectric element 24 bonded on another surface. The actuator piezoelectric element 20 is formed out of piezoelectric ceramic, covers one surface of the flat spring 22, and is bonded on the flat spring 22 by adhesive. The sensor piezoelectric element 24 has a same structure. Lead wire 32 taking out voltage generated by the sensor piezoelectric element 24 correspondingly to its deformation quantity is attached to a side surface of the sensor piezoelectric element 24, and another end of the lead wire 32 is connected to a control means 26 outputting control signal deforming the actuator piezoelectric element 20. Lead wire 30 applying voltage is attached to a side surface of the actuator piezoelectric element 20, and another end of the lead wire 30 is connected to a voltage generation means 28. COPYRIGHT: (C)2010,JPO&INPIT |
