| 摘要 |
PROBLEM TO BE SOLVED: To provide a long separation table with a structure for separating and connecting the long table to solve problems of difficulty in holding high accuracy of flatness and assembling property, and to prevent thermal displacement for a long table. SOLUTION: The long table 100 is separated into a table 100A and a table 100B via a gap 1. The table 100A and the table 100B are connected by a flexible connecting tool 2. In this case, a moving mechanism part 300 is mounted on the table 100A. COPYRIGHT: (C)2010,JPO&INPIT |
