发明名称 METHOD FOR MANUFACTURING MULTIPLE-WAVELENGTH SEMICONDUCTOR LASER
摘要 A method for manufacturing a multiple-wavelength semiconductor laser comprises: forming a first bar having an array of first semiconductor chips, wherein at least two semiconductor lasers producing light of different wavelengths are monolithically formed; forming a second bar having an array of second semiconductor chips, wherein a semiconductor laser producing light having a different wavelength from the light produced by the semiconductor lasers of the first semiconductor chips is formed; forming a third bar by locating a laser-forming surface of said first bar facing a back surface of the second bar, and joining respective first semiconductor chips in the first bar to respective second semiconductor chips in the second bar; forming scribe lines by irradiating boundaries of the first semiconductor chips and boundaries of the second semiconductor chips with laser beams, and dividing the third bar along the scribe lines into respective chips.
申请公布号 US2010190282(A1) 申请公布日期 2010.07.29
申请号 US20090469755 申请日期 2009.05.21
申请人 MITSUBISHI ELECTRIC CORPORATION 发明人 YOSHIDA YASUAKI;SAKUMA HITOSHI
分类号 H01L21/00 主分类号 H01L21/00
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