发明名称 |
INTEGRATED CIRCUIT SYSTEM EMPLOYING STRAINED TECHNOLOGY |
摘要 |
<p>An integrated circuit system that includes: providing a substrate with a PMOS device and an NMOS device; forming an NMOS shallow recess within the substrate; forming a PMOS recess within the substrate; forming a strain inducing layer over the PMOS recess; forming a first dielectric layer over the NMOS device and a second dielectric layer over the PMOS device. Fig 17</p> |
申请公布号 |
SG162768(A1) |
申请公布日期 |
2010.07.29 |
申请号 |
SG20100040459 |
申请日期 |
2007.12.12 |
申请人 |
GLOBALFOUNDRIES SINGAPORE PTE. LTD.;INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
GON LEE JAE;WEE TEO LEE;SEONG-DONG KIM |
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