| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a reticle capable of suppressing formation of a large island-like pattern in scribe lines. <P>SOLUTION: The reticle 8 includes: a square region 112 formed on a substrate and having a product chip pattern formed thereon; a first scribe line 113 formed on the substrate and disposed in contact with the square region 112 and in the periphery of two adjoining sides of the square; second and third scribe lines 1 and 2 formed on the substrate and disposed respectively parallel to two sides of the square except for the above adjoining two sides; and a light-shielding material 14 formed on the substrate and disposed so as to surround the square region 112 and the first, the second and the third scribe lines 113, 1 and 2. <P>COPYRIGHT: (C)2010,JPO&INPIT |
