| 摘要 |
PROBLEM TO BE SOLVED: To carry a semiconductor wafer while being prevented from sagging. SOLUTION: The carrying device 10 includes: a holding means 11 of holding the semiconductor wafer W; and a moving means 12 capable of carrying the semiconductor wafer W by moving the holding means 11. The holding means 11 is provided so that the semiconductor wafer W can be carried through a pair of trays 15 capable of holding the semiconductor wafer W in a thickness direction. COPYRIGHT: (C)2010,JPO&INPIT |
