| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method of adjusting alignment of probe, capable of efficiently, as well as, adjusting the angle of a probe with high accuracy, independently of the skill of an operator, and to provide a shape measurement machine. Ž<P>SOLUTION: The method includes a step ST2 of relatively moving a probe including a contact part at the tip of a shaft part and a measurement object and pick up a movement trajectory image of the probe, in a direction orthogonal to the relative movement direction and crossing the shaft part; a step ST3 of extracting a reference straight line L1, indicating the relative movement direction and a probe axial line L2 indicating tilt of the shaft part from the picked up movement trajectory image of the probe; a step ST4 of calculating the tilt of the probe axial line L2 relative to the extracted reference straight line L1; and a step ST6 of adjusting the tilt of the probe, on the basis of the obtained tilt of the probe axial line L2. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
|
