| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an Al-alloy film for a display device in which contact resistance with a transparent pixel electrode directly connected with the Al-alloy film is sufficiently reduced and corrosion resistance and heat resistance are improved. Ž<P>SOLUTION: The Al-alloy film is directly connected with a transparent conductive film on a substrate of a display device. The Al-alloy film contains ≤0.5 atom% (not including 0 atom%) of Co, 0.2-2.0 atom% of Ge, and ≤0.5 atom% (not including 0 atom%) of Cu. The Al-alloy film is configured such that a total amount of Co, Ge, and Cu is 0.2-2.0 atom% while satisfying formula (1): Cu/Co≤1.5 or formula (2): 2.5≤Cu/Co≤6.0. In formulas (1), (2), Cu and Co represent a content (atom%) of each element in the Al-alloy film, respectively. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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