发明名称 |
Electrostatic chuck and device of manufacturing organic light emitting diode having the same |
摘要 |
The present invention discloses an electrostatic chuck sucking and supporting a substrate with an electrostatic force and an OLED manufacturing apparatus having the same. The electrostatic chuck includes an insulating plate having at least one opening penetrating a center thereof, a pair of electrodes mounted on the insulating plate, a first controller applying a voltage to the pair of electrodes, and an electrostatic charge removing unit disposed near the insulating plate and emitting ions into the at least one opening to remove electrostatic charges distributed around a side of the insulating plate.
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申请公布号 |
US2010188794(A1) |
申请公布日期 |
2010.07.29 |
申请号 |
US20090585895 |
申请日期 |
2009.09.28 |
申请人 |
SAMSUNG MOBILE DISPLAY CO., LTD. |
发明人 |
PARK SANG-YOUNG;MUN JU-EEL;CHA YOU-MIN;JUNG WON-WOONG |
分类号 |
H01L21/683 |
主分类号 |
H01L21/683 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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