| 摘要 |
The invention relates to a reactor (10) for producing polycrystalline silicon, having a reactor floor (2) having a plurality of nozzles (4) formed therein. A siliceous gas flows in through the nozzles (4). A plurality of filament rods (6) are also mounted on the reactor floor (2). A gas outlet opening (8) for feeding used siliceous gas to an enrichment and/or conditioning is further provided. The gas outlet opening (8) is formed at a free end (21) of an inner tube (20), wherein the inner tube (20) is fed through the reactor floor (2). |
