| 发明名称 |
METHOD OF MANUFACTURING RESISTOR FILM, AND RESISTOR FILM |
| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a method of manufacturing a resistor film which has superior efficiency of manufacture and superior resistor characteristics. <P>SOLUTION: A solution of a metal organic compound having an organic metal compound containing at least one metal selected from the group consisting of tin, antimony, tantalum and niobium as a precursor solution, is applied on a supporting member such as an alumina substrate and is dried. Weak laser is irradiated to the substrate to perform a patterning and unreacted part is removed by acid. The substrate is heated from 200 to 500°C and strong laser is irradiated to the substrate to transform into a crystalline thin film. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
| 申请公布号 |
JP2010165888(A) |
申请公布日期 |
2010.07.29 |
| 申请号 |
JP20090007227 |
申请日期 |
2009.01.16 |
| 申请人 |
NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE& TECHNOLOGY;KOA CORP |
发明人 |
TSUCHIYA TETSUO;WATANABE AKIO;NAKAJIMA TOMOHIKO;KUMAGAI TOSHIYA;KOBAYASHI KYOJI;SAWAI YUKO |
| 分类号 |
H01C17/06;C23C18/14 |
主分类号 |
H01C17/06 |
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