| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a radiation detector capable of suppressing reflection of scintillation light on the light-incident surface of a rear-incident photodiode array. <P>SOLUTION: The radiation detector 100 includes: a photodiode array 1 and a scintillator 73, and the photodiode array 1 includes a semiconductor substrate 3 including a front and rear surfaces 3a, 3b; a plurality of p-type semiconductor regions 5 that are disposed side by side, on the rear surface 3b side of the semiconductor substrate 3 and each compose a photodiode 13 by a p-n junction 11 with the semiconductor substrate 3; and an insulation film 43 disposed on the front surface 3a. A surface 43a of the insulation film 43 is constituted of a light-incident surface of the photodiode array 1, and a modified region 50 is formed, without reaching the surface 43a in a region between the adjacent p-type semiconductor regions 5 of the photodiode array 1, by focusing the focusing point at a prescribed position in the region to emit laser beams. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
