| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an autocollimator capable of suppressing attenuation of radiation light and return light and performing accurate measurement and positioning of a measuring object, even if the object has low reflectivity. Ž<P>SOLUTION: The autocollimator, irradiating the measuring object 20 with radiation light to measure the inclination of the measuring object 20 on the basis of return light reflected and made to return from the measuring object 20, includes a light source 11, a radiation-light forming means 12 which causes part of light emitted from the light source 11 to pass and uses it as the radiation light, and an objective lens 13 for converting the radiation light into parallel light and converting the return light into converged light. The light source 11 and the radiation-light forming means 12 are so arranged that the optical axis of the radiation light and the optical axis of the return light pass positions which are different from each other and deviate from the center of the objective lens 13, when the measuring object 20 is opposed to the objective lens 13 at a predetermined angle. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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