| 摘要 |
<P>PROBLEM TO BE SOLVED: To achieve wiring work to a piezoelectric element in the state of maintaining high reliability while suppressing a reduction in yield of the piezoelectric element. <P>SOLUTION: A through-hole 67 is provided to a terminal 57-1. A first liquid stopper 69-1 is arranged around the through-hole 67 being a gap between the terminal 57-1 and the electrode of a common electrode 19, and a liquid trap 73 is provided near the outside of the first liquid stopper 69-1. An electric insulating layer 61 side is made to face a piezoelectric element 13 side to set the terminal 57 oppositely to the common electrode 19, and a liquid conductive adhesive 79 is filled in the through-hole 67 in a state that the first liquid stopper 69-1 is interposed in the gap between the terminal 57 and the common electrode 19. When there is an excess of the liquid adhesive 79, the excess is guided into the liquid trap 73 to prevent the excess from oozing out. <P>COPYRIGHT: (C)2010,JPO&INPIT |
