发明名称 OPTICAL MEMS DEVICE AND REMOTE SENSING SYSTEM UTILIZING THE SAME
摘要 A remote sensing system comprises a micro-electromechanical sensor (MEMS) device comprising an optical energy absorbing sensing element that resonates by thermal expansion induced by absorption of optical signals, a remotely located optical source for transmitting driving optical signals to induce resonation in the sensing element, and a remotely located reader circuitry to read an original frequency of the sensing element using reader optical signals for determining a condition to which the MEMS device is exposed.
申请公布号 US2010189444(A1) 申请公布日期 2010.07.29
申请号 US20090608328 申请日期 2009.10.29
申请人 GENERAL ELECTRIC COMPANY 发明人 VERNOOY DAVID WILLIAM;KOSTE GLEN PETER;KNOBLOCH AARON JAY;AHMAD FAISAL RAZI
分类号 H04B10/12 主分类号 H04B10/12
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