发明名称 DISPLAY DEVICE AND SPUTTERING TARGET FOR PRODUCING THE SAME
摘要 <p>A display device in which an Al alloy film and a conductive oxide film are directly connected without interposition of refractory metal and some or all of Al alloy components deposit or are concentrated at the interface of contact between the Al alloy film and the conductive oxide film. The Al alloy film contains 0.1 to 6 at % of at least one element selected from the group consisting of Ni, Ag, Zn, Cu and Ge, and further contains 1) 0.1 to 2 at % of at least one element selected from the group consisting of Mg, Cr, Mn, Ru, Rh, Pd, Ir, Pt, La, Ce, Pr, Gd, Tb, Sm, Eu, Ho, Er, Tm, Yb, Lu and Dy or 2) 0.1 to 1 at % of at least one element selected from the group consisting of Ti, V, Zr, Nb, Mo, Hf, Ta and W, as the alloy components.</p>
申请公布号 SG162772(A1) 申请公布日期 2010.07.29
申请号 SG20100040731 申请日期 2006.02.16
申请人 KABUSHIKI KAISHA KOBE SEIKO SHO 发明人 GOTOH HIROSHI;KUGIMIYA TOSHIHIRO;TOMIHISA KATSUFUMI
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