| 摘要 |
PROBLEM TO BE SOLVED: To provide a wet processing device and a wet processing method for suppressing galvanic corrosion in a conductive member formed on the surface of a workpiece and removing nano-level particles in a sheet type wet processing feeding processing liquid while rotating the workpiece. SOLUTION: The wet processing device includes a coating means 13 coating at least a part of a surface Wa to be processed of the workpiece W, and feeds the processing liquid in the deoxidized condition by means of a processing liquid supply means 14 while a clearance g is formed between the surface Wa to be processed of the workpiece W held by a holding means 11 and the coating means 13. A voltage is applied between a counter electrode 31a disposed to face the processing surface Wa of the workpiece W, and a processing workpiece electrode 32 connectable to the workpiece W. COPYRIGHT: (C)2010,JPO&INPIT
|
