| 摘要 |
<P>PROBLEM TO BE SOLVED: To perform scribing accurately with a high yield. <P>SOLUTION: A scribing apparatus 1 includes: a conveyance means 10 for web-conveying a strip-shaped continuous flexible substrate B, on which a scribing target film M is formed, while applying a tensile strength; a pressing means 20 for pressing the flexible substrate B by bringing a convex curved surface 21S into contact with the flexible substrate B from a side on which the scribing target film M is not formed; and a scribing means 30 for performing scribing on the scribing target film M. A tensile strength T<SB>n</SB>and a pressing force P per unit cross-sectional area applied to the flexible substrate B during the scribing satisfy the following relations (1)-(3): (1) 1.5 MPa≤T<SB>n</SB>≤25 MPa; (2) 4 kPa≤P≤50 kPa; and (3) 5 GPa<SP>2</SP>≤T<SB>n</SB>×P≤800 GPa<SP>2</SP>. <P>COPYRIGHT: (C)2010,JPO&INPIT |
