| 摘要 |
PROBLEM TO BE SOLVED: To provide a linear guiding mechanism which copes with a long stroke and securing satisfactory linearity, and to provide a measurement device. SOLUTION: The linear guiding mechanism includes a stationary member 1, a moving member 2, and a first double-parallel plate spring mechanism 11A and a second double-parallel plate spring mechanism 12A disposed between the stationary member 1 and the moving member 2 and movably supporting the moving member 2. The first double-parallel plate spring mechanism 11A and the second double-parallel plate spring mechanism 12A are arranged, at an angle which is other than 180 degrees (for example, 90 degrees) regarding the movement axial line of the moving member 2. COPYRIGHT: (C)2010,JPO&INPIT |
