DISPLAY METHOD IN SEMICONDUCTOR MANUFACTURING APPARATUS, AND SEMICONDUCTOR MANUFACTURING APPARATUS

摘要

<P>PROBLEM TO BE SOLVED: To provide a semiconductor manufacturing apparatus capable of displaying whether processing is normally ended or not in addition to the display of processing/unprocessing of respective wafers, capable of preventing normal wafers and defective wafers from being mixed with each other by clearly distinguishing the normal wafers and the defective wafers, and capable of enabling an operator to reliably mount a wafer cassette by displaying the existence/absence of the wafer cassette. Ž<P>SOLUTION: A display part 17 of the semiconductor manufacturing apparatus including a process chamber for performing the processing of wafers and a conveying room for taking out each wafer from a cassette room and conveying the wafer to the process chamber displays a mounting state of wafers in the cassette room. The display part 17 includes a cassette display area 8 for displaying the existence/absence of a cassette, a wafer display area 9 is formed on a predetermined position in the cassette display area 8, and the wafer display area 9 displays whether a wafer exists on the predetermined position or not. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž