TWO-DIMENSIONAL SURFACE-LIGHT-EMITTING LASER ARRAY ELEMENT, SURFACE-LIGHT-EMITTING LASER DEVICE, AND LIGHT SOURCE

摘要

A two-dimensional surface-light-emitting laser array element comprising a plurality of surface-light-emitting laser elements provided with a substrate, a lower multilayer reflecting mirror and an upper multilayer reflecting mirror which are formed on the substrate and formed from the periodic structure of high refractive index layers and low refractive index layers, an active layer provided between the lower and upper multilayer reflecting mirrors, a lower side contact layer which is located between the active layer and the lower multilayer reflecting mirror and provided extending to the outer peripheral side of the upper multilayer reflecting mirror, a lower side electrode formed on the surface of the extended portion of the lower side contact layer, and an upper side electrode for injecting a current into the active layer, the plurality of surface-light-emitting laser elements being electrically connected in series so as to form a series connection element array.  As a result, provided are the two-dimensional surface-light-emitting laser array element capable of achieving high energy conversion efficiency with a simple configuration and cable of high-integrating, and a surface-light-emitting laser device using same, and a light source.