Vorrichtung zur Erzeugung von Plasma,申请号DE19995015175-传众专利搜索

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发明名称	Vorrichtung zur Erzeugung von Plasma
摘要
申请公布号	DE59915175(D1)	申请公布日期	2010.07.29
申请号	DE19995015175	申请日期	1999.03.13
申请人	OERLIKON DEUTSCHLAND HOLDING GMBH	发明人	LIEHR, MICHAEL DR.
分类号	H05H1/46;H01J37/32	主分类号	H05H1/46
代理机构		代理人
主权项
地址

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