A MANUFACTURING METHOD OF TRICHLOROSILANE(SICL3) AND A TRICHLOROSILANE MANUFACTURED BY ITS METHOD

摘要

PURPOSE: A manufacturing method of trichlorosilane and the trichlorosilane manufactured thereby are provided to reduce costs for managing and maintaining and installation costs by gaining a high conversion rate of trichlorosilane. CONSTITUTION: A Manufacturing method of trichlorosilane and the trichlorosilane manufactured thereby includes a step for gaining trichlorosilane from a reactor(11) by injecting hydrogen chloride into a reaction and mounting metallic silicon and a palladium catalyst in the reactor. The palladium catalyst is manufactured by drying the palladium metal after dipping the palladium metal in PdCl3 or Pd(NO3) liquid by selecting a carrier among active alumina, zeolite, activated charcoal, diatomite, alumina and silica.