| 发明名称 |
Method of enhancing the longivity of transport devices |
| 摘要 |
<p>The method involves using ceramic material as transport aid, where the ceramic material is exposed in the process chamber (12). The process chamber is opened-up for outer atmosphere. The heat treatment is carried-out with the temperature in the process chamber.</p> |
| 申请公布号 |
EP2211378(A2) |
申请公布日期 |
2010.07.28 |
| 申请号 |
EP20100000793 |
申请日期 |
2010.01.27 |
| 申请人 |
SCHOTT SOLAR AG |
发明人 |
HORZEL, JOERG, DR.;BLENDIN, GABRIELE |
| 分类号 |
H01L21/677;H01L21/00 |
主分类号 |
H01L21/677 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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