发明名称 SEMICONDUCTOR STRUCTURE AND METHOD OF MANUFACTURE
摘要 In various embodiments, semiconductor structures and methods to manufacture these structures are disclosed. In one embodiment, a semiconductor device includes a plurality of rectilinear structures, wherein the plurality of rectilinear structures comprise silicon dioxide and extend from a surface of a semiconductor material to a distance of at least about three microns or greater below the surface of the semiconductor material and wherein a first rectilinear structure of the plurality of rectilinear structures is perpendicular to, or substantially perpendicular to, a second rectilinear structure of the plurality of rectilinear structures. Other embodiments are described and claimed.
申请公布号 EP2210265(A1) 申请公布日期 2010.07.28
申请号 EP20080842013 申请日期 2008.07.25
申请人 HVVI SEMICONDUCTORS, INC. 发明人 DAVIES, ROBERT, BRUCE
分类号 H01L21/00;H01L21/762;H01L21/764;H01L23/66 主分类号 H01L21/00
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