Method of Manufacturing Laminated Wafer by High Temperature Laminating Method

摘要

To provide a method of manufacturing a laminated wafer by which a strong coupling is achieved between wafers made of different materials having a large difference in thermal expansion coefficient without lowering a maximum heat treatment temperature as well as in which cracks or chips of the wafer does not occur. A method of manufacturing a laminated wafer 7 by forming a silicon film layer on a surface 4 of an insulating substrate 3 comprising the steps in the following order of: applying a surface activation treatment to both a surface 2 of a silicon wafer 1 or a silicon wafer 1 to which an oxide film is layered and a surface 4 of the insulating substrate 3 followed by laminating in an atmosphere of temperature exceeding 50°C and lower than 300°C, applying a heat treatment to a laminated wafer 5 at a temperature of 200°C to 350°C, and thinning the silicon wafer 1 by a combination of grinding, etching and polishing to form a silicon film layer.