| 摘要 |
PURPOSE: A method for forming a polycrystalline film is provided to obtain an improved characteristic by growing a crystal using a mono-crystalline seed without a crystal-grain-boundary. CONSTITUTION: A substrate including a target film is prepared(S110). First laser is radiated to the target film through a first mask such that the target film is crystallized(S120). A first transmitting region and a first non-transmitting region are formed on the first mask. Second laser is radiated to the target film through a second mask such that the target film is crystallized(S130). A second transmitting region and a second non-transmitting region are formed on the second mask. A part of the target film under the second transmitting film is completely melted.
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