Plasma resistant part and manufacturing method the same,申请号KR20080044946-传众专利搜索

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发明名称	Plasma resistant part and manufacturing method the same
摘要
申请公布号	KR100972567(B1)	申请公布日期	2010.07.28
申请号	KR20080044946	申请日期	2008.05.15
申请人		发明人
分类号	C03C3/076;C03C3/083;C03C3/085	主分类号	C03C3/076
代理机构		代理人
主权项
地址

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