发明名称 Particle beam device with reduced emission of undesired material
摘要 <p>A particle beam impurity removing device for removing impurities from a particle beam emitted in a beam direction is provided, including an emission angle confinement means (118; 1182) adapted to confine emission angles of particles included in the particle beam.</p>
申请公布号 EP2211367(A1) 申请公布日期 2010.07.28
申请号 EP20090151036 申请日期 2009.01.21
申请人 APPLIED MATERIALS, INC. 发明人 KREMPEL-HESSE, JOERG
分类号 H01J37/09 主分类号 H01J37/09
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