METHOD OF PRODUCING SYNTHETIC QUARTZ GLASS FOR EXCIMER LASER

摘要

PURPOSE: A manufacturing method of a synthetic quartz glass for an eximer laser is provided to control the vacuum decree at the vacuum glass process of porous silica sand. CONSTITUTION: A manufacturing method of a synthetic quartz glass for an eximer laser comprises the following steps: obtaining a silica fine particle by hydrolyzing or oxygen-decomposing a silica ingredient compound inside a vacuum sintering furnace; forming porous silica sand; and forming a glass out of the porous silica sand and hot forming, annealing, and hydrogen-doping.