发明名称 System and method for sensing position utilizing an uncalibrated surface
摘要 Systems and methods adapted for use with uncalibrated patterned surfaces for sensing any of position, displacement, velocity, acceleration, area, and volume are provided. A system includes a memory, processing electronics, and at least one readhead adapted to move relative to the surface and including a radiation source, lens, and an optical array transducer. One aspect includes generating a mapping data set representative of an intensity map of the patterned surface. Another aspect provides a variable travel speed readhead. Other aspects include multiple readheads adapted to travel in concert. Incremental and absolute sensing are provided, including systems having sub-pixel spatial resolution.
申请公布号 US7763875(B2) 申请公布日期 2010.07.27
申请号 US20060517862 申请日期 2006.09.07
申请人 ROMANOV NIKOLAI L;KOSSAKOVSKI DMITRI A 发明人 ROMANOV NIKOLAI L.;KOSSAKOVSKI DMITRI A.
分类号 G01N21/86;H01L27/00 主分类号 G01N21/86
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