发明名称 Method and apparatus for thin film/layer fabrication and deposition
摘要 A method and apparatus for controlling the thickness of a thin film or thin layer of discrete particles or of a heterogeneous mixture characterized in that the interfacial tension forces between the solution or suspension and its environment are used as the driving forces to evenly spread the solution, suspension or mixture while the solvent evaporates and/or dilutes.
申请公布号 US7763310(B2) 申请公布日期 2010.07.27
申请号 US20090352150 申请日期 2009.01.12
申请人 NANOMETRIX INC. 发明人 SCHNEIDER JUAN
分类号 B05D5/00 主分类号 B05D5/00
代理机构 代理人
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